Message handling
E5 and E37 message handling (SxFy) for SEMI-compliant tools.
SECS/GEM Integration for Semiconductor Equipment
IoTAutoGen solution
One host layer for fab tools from many makers.
Fab tools from different makers and generations handle SECS/GEM in slightly different ways. IoTAutoGen gives your host side one way to talk to them, collect their data, and pass it on to MES and analytics.
Semiconductor connectivitySECS/GEM and OPC UA in one gateway.Events, alarms, recipes, and host commands from one platform.
The Challenge
Why SECS/GEM integration takes more than a protocol stack
SECS/GEM is the standard way for host software to communicate with semiconductor equipment. In practice a fab runs tools from many makers and generations. Each tool exposes its own events, alarms, variables, and recipe handling, so host software that works with one tool often needs changes for the next.
Older tools may speak only SECS/GEM while newer systems move toward OPC UA. Teams end up with two data stacks, and MES, analytics, and maintenance teams each see a different picture of the same equipment.
How It Works
How IoTAutoGen handles SECS/GEM
IoTAutoGen includes a native protocol gateway with SECS/GEM message handling, the GEM state model, recipe management, alarms, events, and host command execution. It covers E5 and E37 message handling and E30 GEM behavior, and fab standards such as E87 and E90 are part of its semiconductor coverage.
Standards named on this page describe what the platform supports. They are not a formal SEMI certification.
SECS/GEM in the same gateway as OPC UA, Modbus, Profinet, and MQTT
Events and alarms forwarded to MES and analytics in a structured form
Recipe management and host commands with role-based approval
A built-in simulator to test host logic before it touches a real tool
Capabilities
What is included
GEM state model
The full GEM state model, including remote commands and equipment constants.
Alarms and events
Alarms and events are collected and forwarded to MES as structured events.
Recipe management
Recipe management and host command execution under E30 GEM behavior.
OPC UA alongside SECS/GEM
Blend OPC UA and SECS/GEM data in one workflow without custom adapters.
Vendor drivers and adapters
Support for custom tool vendor drivers and protocol adapters.
Deployment
Integration and deployment considerations
Tool by tool validation. Makers implement SECS/GEM options differently, so each tool and software version is checked during setup.
Where it runs. On your edge hardware, an industrial PC, or a gateway appliance, close to the tools.
Existing systems. Connects to your MES, SCADA, historian, and ERP, or acts as the operational layer where there is no MES.
Security. Data in transit is encrypted, with certificate-based authentication and no inbound firewall ports required.
Test first. The simulator runs SECS/GEM message types, state transitions, alarms, events, and recipe steps, so host software and MES hooks can be validated without access to the fab floor.
What Teams Get
Practical outcomes
A consistent data model. Tools from different makers share one model, so downstream systems do not need tool-specific logic.
Shared visibility. Alarms, events, and recipes reach MES, analytics, and maintenance teams from the same source.
Safer rollout. Integration logic can be tested in simulation, including fault cases, before it touches real equipment.
Use Cases
Where it fits
Adding legacy fab tools to a plant data platformCollecting alarms and events for maintenance and yield teamsManaging recipes and remote commands from one hostRunning SECS/GEM and OPC UA equipment under one data modelTesting host software and MES hooks before tool access
Questions
Frequently asked questions
What is SECS/GEM used for?
SECS/GEM is a set of SEMI standards that lets host software communicate with semiconductor equipment. Hosts use it to collect events, alarms, and variables, manage recipes, and send remote commands.
Which SEMI standards does IoTAutoGen support?
IoTAutoGen handles SECS/GEM messaging with E5 and E37, GEM behavior under E30, and covers E87 and E90 for fab environments. We confirm support for each tool and software version during assessment. This describes standards support, not a formal SEMI certification.
Can it work with OPC UA equipment at the same time?
Yes. The gateway handles OPC UA and SECS/GEM in one workflow, so older and newer tools share one data model.
Do I need a MES first?
No. IoTAutoGen can act as the operational layer when there is no MES, or connect to your existing MES, SCADA, historian, and ERP.
Can we test before connecting real tools?
Yes. The built-in simulator runs SECS/GEM messages, states, alarms, events, and recipe steps, including fault injection modes, so you can test host software and alarm handling first.
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Explore IoTAutoGenRead: Semiconductor IIoT, bridging OPC UA and SECS/GEM
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